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NGUYEN NGOC Tan

Organization: Institut d’Electronique de Microélectronique et de Nanotechnologies UMR-8520

Address:Université de Villeneuve d'Ascq Cité Scientifique, Avenue Poincaré BP 60069, 59652 Villeneuve d'Ascq Cedex, FRANCE

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NGUYEN NGOC Tan graduated from Danang University of Technology in Vietnam. Then, he continued to pursue his study in Lab of Precision Manufacturing and Technology at Inje University in Korea. After finishing his MSc degree in Mechanical engineering, he went to work in Korea Institute of Machinery and Materials for few months. In there, he had responsibility to deal with the modelling and compensation of Roll-to-roll printing system which is applied for Printed Electronic devices. Some months later, he decided to make further studying by joining in MICACT project.

Now he is one of member in MAMINA team in IEMN which belong to CNRS in France.

For next three years, he will concentrate on fabrication technology of Ionic EAP actuator in which is mainly on develop a mathematical model. It ensures on the one hand, a better understanding of phenomena involved in the conducting IPN, and on the other hand, to predict and effectively control the mechanical performance and energy efficiency. At first glance, it appears appropriate to work on a model by lumped elements (also called localized model parameters). Using the finite element method appears well suited to address this issue in particular to simulate non-linear behavior such as large displacements. In a second step, it is essential to develop a more complete and more realistic model. Thus, the model should explicitly describe not only the mechanism but also the aspects of ion conduction and electromechanical conversion. By combining the results, the potential of these new materials for soft MEMS will be demonstrated.

 

 

 

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Supervisor: Prof. Eric Cattan
Organization: Institut d’Electronique de Microélectronique et de Nanotechnologies UMR-8520
Address:Université de Villeneuve d'Ascq Cité Scientifique, Avenue Poincaré BP 60069, 59652 Villeneuve d'Ascq Cedex, FRANCE

E-mail: This email address is being protected from spambots. You need JavaScript enabled to view it.

 

 

 

BIOGRAPHY

Following the “Habilitation à Diriger des Recherches” degree in 2001, he obtained a Professors degree at the section 63 in 2002. He has had PhD in Electronic, Electrotechnique, Automatism from the University of Paris Sud (Orsay) since 1999. He has written more than seventy articles in the field of piezoelectric micro-actuators. From 2002 he has been a Research Scientist at the Institut d’Electronique, de Microélectronique et de Nanotechnologie, University of Lille (USTL). Before September 2005 he developed the growth and the characterization of ferroelectric and piezoelectric thin films. He has also developed the integration of piezoelectric thin films in microsystems. Since September 2005 his research subject concern bioinspired microsystems (OVMI project) in the group NAM6. His research is actually oriented on the integration of EAPs in microsystem to fabricate first micro-drone at the size of insect.

MAIN RESEARCH ACTIVITIES

The activity described is made in relationship with LPPI (Cergy-Pontoise, FRANCE).We works on a new method to obtain micrometric specific electroactive polymer actuators (EAP) operating in air. We demonstrated that it is possible to reduce the thickness of these actuators to make them compatible with the micro-fabrication technologies. To micro-size these materials a dry etching is used to achieve vertical sidewalls and high etch rates. Micro-beams of interpenetrating polymer networks (IPN) are obtained and are actuated, and some performances are improved compared with bulk material.

The actuators used is a dielectric matrix of IPN (polyethyleneoxyde and polybutadiene : PEO/PB) at which, on both sides, a new interpenetrating is made with conducting polymer (Poly3,4-ethylenedioxythiophene : PEDOT). Thus, no metallic electrodes are used and the electrodes are perfectly compliant. This IPN is considered to be potential alternative to conventional actuators due to their attractive properties, including minimal electric power consumption, light weight, biocompatibility, insensitive to magnetic fields. Furthermore, the scaling down of this IPN to the micron level should greatly improve their actuation properties such as the frequency or the peak force. The area relevant of our work is to demonstrate that this material can be integrated into micro structures using existing technologies involved, i.e. make its thickness compatible, pattern through standard photolithography and dry etching techniques. Reactive ion etching (RIE) is first time used to pattern IPN actuators. A high speed etch rate and a good selectivity is obtained in comparison to the other polymers.Vertical sidewalls and no phenomenon of re-deposition are observed. Micro-beam operating in open air is obtained. The spectral response of these micro-sized IPN actuators has been determined. Small-sized IPN actuators are useful in numerous applications in particular for a SU-8 flapping-wing flying MEMS.

 

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